J+MEMS Series: Piezoresistive Pressure Dies for Low Pressure

New piezoresistive pressure dies of the J+MEMS Series with silicon wafer

AMSYS is expanding its range of piezoresistive pressure dies with the new J+MEMS Series. Measuring just 2.0 x 2.0 x 0.9 mm, these sensor dies enable precise measurement of low and very low pressures. With measuring ranges from 2 to 100 kPa, high sensitivity and compact dimensions, they are particularly well suited for demanding sensor solutions and high-volume applications.

The new J+MEMS Series was developed for measuring absolute and differential pressure and will be presented at the electronica and Compamed trade fairs. These silicon sensing elements are designed for integration into custom pressure sensors and OEM assemblies. This enables manufacturers to implement compact sensor designs for medical technology, industrial applications and building technology where reliable detection of small pressure changes is essential.

The operating principle is based on a piezoresistive Wheatstone bridge, which detects pressure-induced deformation of a silicon diaphragm. The pressure-sensitive diaphragm is produced by KOH etching on epitaxial 6-inch silicon wafers. An anodically bonded glass substrate completes the MEMS structure. For further details on the operating principle, see our whitepaper: How to measure differential pressure using piezoresistive sensing elements

The J+MEMS Series therefore combines advanced microsystems technology with manufacturing designed for high production volumes.

At just 2.0 x 2.0 x 0.9 mm, the pressure dies cover measuring ranges from 0.3 to 15 psi, equivalent to 2 to 100 kPa. Sensitivity reaches up to 4,350 µV/V/kPa, while the specified stability is below 0.1% FS. The specified temperature range extends from -40 to +150 °C, and the glass thickness is 0.5 mm.

The series is available in semi-open and closed bridge configurations. In addition to use as uncompensated sensing elements, J+MEMS technology is intended for the production of fully compensated and amplified pressure sensors. Oil-filled pressure transducers and pressure transmitters are also possible system applications. The pressure dies are suitable for direct contact with clean, dry air, non-corrosive gases and non-conductive liquids such as silicone oil.

Typical applications include patient monitors, ventilators and oxygen concentrators. Fluid suction systems and integration as the central sensing element in pressure transmitters and OEM pressure sensors are also key applications (whitepaper). In industrial control systems and heating, ventilation and air conditioning (HVAC), the low pressure ranges enable efficient volume flow measurement or filter monitoring.

With the new J+MEMS Series, AMSYS expands its selection of MEMS pressure dies for high-volume OEM applications. Its patented technology and in-house development and manufacturing provide the basis for a controlled supply chain. AMSYS offers technical advice on selecting suitable sensing elements and integrating them into application-focused pressure sensor solutions. Meet AMSYS at the electronica trade fair in Munich (hall B4, booth 201) or Compamed in Duesseldorf (8BN15).

Technical Highlights 

• Pressure Types and Ranges: Absolute and differential pressure from 2 to 100 kPa (0.3 to 15 psi)
• Compact Design: Dimensions of just 2.0 × 2.0 × 0.9 mm
• High Sensitivity: Up to 4,350 µV/V/kPa
• High Stability: Less than 0.1% FS 
• Wide Temperature Range: −40 to +150 °C

The Company

AMSYS GmbH & Co. KG is a German company specializing in sensor technology, particularly pressure measurement. Its product range includes pressure sensors for measurement ranges from 25 Pa to 800 bar, as well as humidity, temperature, and inclination sensors, along with wireless solutions. In addition to standard products, AMSYS offers custom adaptations to meet specific customer requirements.